重大突破!中國新一代光刻機亮相上海進博會 國產率破90%ASML慌了參展六屆突缺席【#全球大爆卦】20261110@全球大視野Global_Vision — Transcript

Full transcript

1. 0:00I have some breaking news to share: a
2. 0:01major breakthrough. A Chinese
3. 0:03lithography machine has entered two
4. 0:04production lines, with a domestic
5. 0:06localization rate exceeding 90%. Right,
6. 0:08and it also made a stunning debut at the
7. 0:10CIIE on this very day. Let's take a look
8. 0:12; this new generation of Chinese
9. 0:14lithography equipment was unveiled at
10. 0:16the CIIE, which runs from November 5th
11. 0:18to November 10th.
12. 0:19Actually, just before we went live, a
13. 0:21peer of mine in mainland China asked me
14. 0:24, "Why didn't you come to the CIIE?"
15. 0:26I actually really wanted to go, and I
16. 0:28hope to have the opportunity to check it
17. 0:30out in the future. Because at the CIIE,
18. 0:32they always showcase some of their
19. 0:34latest products to everyone.
20. 0:36This time, Shanghai Micro Electronics
21. 0:38Equipment (SMEE) showcased its
22. 0:40self-developed new-generation front-end
23. 0:42dry lithography machine and a scanner
24. 0:44projection lithography model.
25. 0:47There are two models in total, which
26. 0:48we've found images of to show you.
27. 0:52Furthermore, during this debut at the
28. 0:54CIIE, SMEE also disclosed some
29. 0:56information, including that China's
30. 0:58current domestic localization rate has
31. 1:00exceeded 90%, filling a gap in the
32. 1:02domestic market.
33. 1:06In addition, it is actually already in
34. 1:08operation on production lines.
35. 1:12They announced that it has supported the
36. 1:14production of over 10 million wafers,
37. 1:16with the effective operating rate of
38. 1:17current domestic equipment exceeding 92
39. 1:19%.
40. 1:22Another point that has drawn much
41. 1:24outside attention is that in such a
42. 1:26large event, many international
43. 1:27manufacturers have come to participate.
44. 1:31For the past six years, ASML has
45. 1:33attended, but having participated for
46. 1:36six consecutive years since 2020, ASML
47. 1:38is suddenly absent this year.
48. 1:42I looked up the official reason; they
49. 1:44stated that it conflicted with their
50. 1:46company's internal global meetings.
51. 1:50But they are absent, and you see, at the
52. 1:52very moment they are absent, China
53. 1:54unveiled two of its newest lithography
54. 1:56machines.
55. 1:57Let's ask Brother Daxian immediately:
56. 1:59what does he think this move signifies?
57. 2:02>> Right, I was also planning to attend the
58. 2:05CIIE this time, but because of the
59. 2:06elections in Taiwan, I had to come back
60. 2:08to help with the campaign, so I couldn't
61. 2:10make it to the CIIE.
62. 2:13Let me give everyone a brief
63. 2:14introduction: the lithography machines
64. 2:17you hear about are divided into two
65. 2:19types—one is called EUV, or extreme
66. 2:21ultraviolet, and the other is called DUV
67. 2:23, or deep ultraviolet.
68. 2:27The difference between the two lies in
69. 2:28the wavelength of the light source they
70. 2:30excite; the narrower the wavelength of
71. 2:32the light source, the more advanced the
72. 2:34process you can perform, and the smaller
73. 2:35you can make the chips.
74. 2:39For Extreme Ultraviolet, known as EUV,
75. 2:42the wavelength of the light excited from
76. 2:44the tin droplets is approximately 13.5
77. 2:46nanometers.
78. 2:50Once you can achieve 13.5 nanometers,
79. 2:53you have reached a very critical
80. 2:54milestone in the progress of EUV
81. 2:56technology.
82. 2:59However, for DUV, which is called Deep
83. 3:01Ultraviolet, the wavelength of the
84. 3:03excited light is not as narrow as that
85. 3:06of EUV, which is why DUV can only be
86. 3:08used to manufacture chips with mature
87. 3:10processes.
88. 3:12That is the first piece of popular
89. 3:14science I've shared with you.
90. 3:16Secondly, we just heard Hui-lin mention
91. 3:18"dry process." What is "dry process"?
92. 3:21DUV can be divided into "dry" and what
93. 3:24we call "wet" or "immersion" lithography
94. 3:27.
95. 3:28Where is the difference between the two
96. 3:29?
97. 3:32The difference lies in what is placed
98. 3:34between the wafer—the wafer you are
99. 3:36about to etch—and the objective lens
100. 3:38below.
101. 3:41If you simply place it there with air in
102. 3:43between, that is called the dry process
103. 3:45.
104. 3:46But if you use pure water in between,
105. 3:48specifically ultra-high-purity water,
106. 3:50that is called the immersion process.
107. 3:53Many people ask, what is the difference
108. 3:55between dry and wet? It lies in the
109. 3:57medium.
110. 3:58If it is air, your refractive index is 1
111. 4:01; if it is high-purity ultrapure water,
112. 4:04your refractive index is 1.44.
113. 4:09The higher the refractive index of the
114. 4:11intermediate medium, the smaller the
115. 4:13final size of the chip that can be
116. 4:15produced.
117. 4:19So, everyone can see that the chips
118. 4:21produced by the wet process are
119. 4:23relatively smaller because there is
120. 4:25water in between, resulting in a higher
121. 4:27refractive index; therefore, wet DUV can
122. 4:29produce chips of approximately 28 to 38
123. 4:31nanometers.
124. 4:37As for the dry process, which I just
125. 4:39mentioned has a lower refractive index,
126. 4:41the chips it produces are generally 65
127. 4:43nanometers or larger.
128. 4:47Alright, now let’s turn back to SME,
129. 4:49which is the Shanghai Micro Electronics
130. 4:51Equipment Company; this company actually
131. 4:53has three models.
132. 4:56>> At this exhibition, everyone only
133. 4:59noticed two models, the SSB800 and the
134. 5:01SSC800.
135. 5:03But in fact, there is also an SSA800
136. 5:05model.
137. 5:06The SSA800 model is what I am talking
138. 5:08about; it is an immersion DUV. Yeah,
139. 5:11>> Since it is immersion DUV, the chips it
140. 5:13produces are smaller, at 28 nanometers.
141. 5:15What we are currently saying about China
142. 5:18being able to use 28nm multi-patterning
143. 5:21starts here; its limit can reach 28nm,
144. 5:23and this SSA800 has already entered
145. 5:25production with a localization rate of
146. 5:28over 85%.
147. 5:31Now, the SB800 and SC800 you see are
148. 5:33both dry DUVs, so the chips they produce
149. 5:36are relatively larger, which are mature
150. 5:38process chips.
151. 5:42The SB800 uses i-line technology, so the
152. 5:45wavelength of the light source it
153. 5:47excites is about 365 nanometers.
154. 5:50With a 365nm wavelength, the chip size
155. 5:53it can produce is between about 250nm
156. 5:56and 350nm, and the localization rate
157. 5:58exceeds 90%.
158. 5:59>> As for the SSC800, it uses KrF
159. 6:02technology, so the light wavelength it
160. 6:04excites is narrower, about 248
161. 6:06nanometers, so the chip size it can
162. 6:09produce is between about 110nm and 180nm
163. 6:12, and the localization rate also exceeds
164. 6:1590%. Many people always talk about
165. 6:17multi-patterning when discussing this,
166. 6:20saying they can use multi-patterning to
167. 6:22turn 28nm into 7nm. Does everyone know
168. 6:24what multi-patterning is?
169. 6:26Let me give you an example:
170. 6:28multi-patterning is like wanting to draw
171. 6:30two very thin parallel lines on a wall,
172. 6:32but you only have a very thick brush.
173. 6:34What would you do?
174. 6:37As you can see, DUV is like that thick
175. 6:39brush because its light wavelength is
176. 6:41too long and too wide, so their method
177. 6:43is: you take that brush and paint a
178. 6:45stroke on the wall first.
179. 6:49After you paint one stroke, you apply a
180. 6:51special substance to both sides, and
181. 6:53then what do you do next?
182. 6:56You dig out and etch away the middle
183. 6:58part.
184. 6:59Yeah,
185. 6:59>> After you remove that, aren't you left
186. 7:01with just two edge lines? You are left
187. 7:04with two very narrow lines; this is what
188. 7:06we call multi-patterning, explained in
189. 7:08simple terms. So how is multi-patterning
190. 7:10done? First, you need to perform an
191. 7:12initial exposure, then move to the
192. 7:13second step of deposition, which
193. 7:15involves depositing material on both
194. 7:17sides. Third, you need to etch, clearing
195. 7:19out the center. Fourth, you need to
196. 7:21deposit again, which requires another
197. 7:22exposure. This is called
198. 7:24multi-patterning. Repeatedly performing
199. 7:26this multi-patterning lowers the yield
200. 7:27each time, because getting the alignment
201. 7:29right for these repeated exposures is
202. 7:31not an easy task. So, the
203. 7:33multi-patterning that Mainland China is
204. 7:35currently capable of is what SMIC is
205. 7:37doing for Huawei’s 7nm Kirin chips. Its
206. 7:39yield is probably only around 50%. A 50
207. 7:41%yield means the cost is double that of
208. 7:44TSMC’s—it’s effectively two times higher
209. 7:47. But for Mainland China, I believe they
210. 7:49can afford it. The priority now is
211. 7:51whether or not there are chips available
212. 7:53; it’s no longer a question of yield.
213. 7:56Therefore, in the short term, using this
214. 7:58multi-patterning method—despite the low
215. 8:00yield and high costs—is sufficient to
216. 8:02meet their current demands.
217. 8:05So, what will we see next? It is the
218. 8:0713.5 nm extreme ultraviolet light I
219. 8:09mentioned, which has actually been
220. 8:11developed by domestic companies in
221. 8:13Mainland China. So, when it comes to the
222. 8:15mass production of EUV lithography
223. 8:17machines, I think it will happen within
224. 8:19the next year or two.
225. 8:20>> Yes. Hello everyone, I’m your anchor,
226. 8:22Lin Chia-yuan. With high stress in life
227. 8:24, insomnia and light sleep have become
228. 8:25common troubles for modern people.
229. 8:27Sunstar Whole-Effect Kefir Probiotics
230. 8:29now proudly introduces the "Good Night"
231. 8:31enhanced version, featuring four natural
232. 8:33herbs: Ashwagandha, Tryptophan,
233. 8:34L-Theanine, and Lemon Balm. Choose
234. 8:36Sunstar Whole-Effect Kefir Probiotics
235. 8:38for your daily care, keeping your body
236. 8:40free of burden. Kefir every day, for a
237. 8:42better life. GoodKefir, FeelGood. Please
238. 8:45visit "Kuaidiangou" to order for your
239. 8:46health, and enter the referral code for
240. 8:48an extra discount.
241. 8:54Sunstar Whole-Effect Kefir Probiotics:
242. 8:57Basic version and Good Night enhanced
243. 8:59version—new packaging, upgraded content
244. 9:02.